JPH0383744U - - Google Patents

Info

Publication number
JPH0383744U
JPH0383744U JP14637989U JP14637989U JPH0383744U JP H0383744 U JPH0383744 U JP H0383744U JP 14637989 U JP14637989 U JP 14637989U JP 14637989 U JP14637989 U JP 14637989U JP H0383744 U JPH0383744 U JP H0383744U
Authority
JP
Japan
Prior art keywords
filter
clean room
harmful gas
support member
drive source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14637989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH086182Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14637989U priority Critical patent/JPH086182Y2/ja
Publication of JPH0383744U publication Critical patent/JPH0383744U/ja
Application granted granted Critical
Publication of JPH086182Y2 publication Critical patent/JPH086182Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP14637989U 1989-12-19 1989-12-19 クリーンルーム Expired - Lifetime JPH086182Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14637989U JPH086182Y2 (ja) 1989-12-19 1989-12-19 クリーンルーム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14637989U JPH086182Y2 (ja) 1989-12-19 1989-12-19 クリーンルーム

Publications (2)

Publication Number Publication Date
JPH0383744U true JPH0383744U (en]) 1991-08-26
JPH086182Y2 JPH086182Y2 (ja) 1996-02-21

Family

ID=31692971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14637989U Expired - Lifetime JPH086182Y2 (ja) 1989-12-19 1989-12-19 クリーンルーム

Country Status (1)

Country Link
JP (1) JPH086182Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021124254A (ja) * 2020-02-06 2021-08-30 株式会社大林組 空調システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021124254A (ja) * 2020-02-06 2021-08-30 株式会社大林組 空調システム

Also Published As

Publication number Publication date
JPH086182Y2 (ja) 1996-02-21

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